SIMULATION OF PERFLUOROMETHANE DECOMPOSITION IN AN ATMOSPHERIC-PRESSURE MICROWAVE DISCHARGE
A. P. Chernukho,a A. N. Migun, a B. S. A. Zhdanok, a J. C. Rostaingb and J. Perrinb UDC 537.523.9, 539.1.04 The kinetic mechanism of transformation of perfluorohydrocarbons into the element system C-F-N-O has been investigated in detail. A two-dimensional stationary model of a reactor for decomposition of perfluoromethane under the conditions characteristic of a microwave discharge at atmospheric pressure is presented. Good agreement between the experimental and theoretical data has been obtained. aA. V. Luikov Heat and Mass Transfer Institute, National Academy of Sciences of Belarus, 15 P. Brovka Str., Minsk, 220072, Belarus; email: chern@itmo.by; bAir Liquide Recherche et Development, France. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 78, No. 2, pp. 178-188, March-April, 2005. Original article submitted September 30, 2004.