THEORETICAL ANALYSIS AND MODELING
OF THE OBTAINING OF POLYCRYSTALLINE
SILICON IN A FLUIDIZED-BED REACTOR

V. A. Borodulya, L. M. Vinogradov,
O. S. Rabinovich, and A. V. Akulich

UDC 669.3.782.61.1

A theoretical analysis has been performed and basic problems 
of the technology of obtaining polycrystalline silicon by pyrolytic 
decomposition of monosilane in a fluidized-bed reactor have been considered. 
A one-dimensional, two-phase model of this process and basic results 
of mathematical modeling have been presented

A. V. Luikov Heat and Mass Transfer Institute, National 
Academy of Sciences of Belarus, 15 P. Brovka Str., Minsk, 220072, 
Belarus. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 78, 
No. 1, pp. 48-53, January-February, 2005. Original article 
submitted August 13, 2004..