MODELING OF THE MORPHOLOGY OF ALUMINUM FILMS BEFORE 
AND AFTER DIFFERENT KINDS OF THERMAL TREATMENT

V. A. Pilippenko, V. M. Malofeev, V. N. Ponomar', 
A. N. Mikhnyuk, and V. M. Borzdov

UDC 621.382:621.373.820

This paper considers the process of change in the structure 
of aluminum films on silicon in metallizing integrated microcircuits 
under the conditions of both prolonged and fast thermal treatment. 
We propose an analytical model of the formation and recrystallization 
of condensed aluminum films. It is based on the application of the 
Monte Carlo method and describes the change in the size and angles 
at triple points depending on the temperature and time of thermal 
treatment.

Unitary Enterprise "Belmikrosistemy," Scientific-Production 
Association "Integral," Minsk, Belarus. Translated from Inzhenerno-Fizicheskii 
Zhurnal, Vol. 76, No. 4, pp. 99-103, July-August, 2003. Original 
article submitted October 28, 2002.