EVALUATION OF THE THERMOPHYSICAL CHARACTERISTICS OF A BUBBLING-TYPE
REACTOR ON TRANSFORMATION OF SILICON TETRAFLUORIDE INTO MONOSILANE

N. V. Stepanenko,a V. P. Vasilevich,a and
V. A. Nemtsevb

UDC 532.529

The thermophysical aspects of silicon tetrafluoride transformation 
into monosilane are analyzed. An approximate mathematical model and 
calculation results are provided. The contribution of heat of the 
chemical reaction is evaluated.

aBelarusian State University of Informatics and 
Radioelectronics, Minsk; bInstitute of Energetics Problems, 
National Academy of Sciences of Belarus; email: irma@infonet.by. 
Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 75, No. 6, pp. 58-60, 
November-December, 2002. 
Original article submitted June 20, 2002.

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JEPTER7492018