SYNTHESIS OF THIN FILMS WITH CONTROLLED
ABSORPTION USING A JET HIGH-FREQUENCY
INDUCTION PLASMATRON 
I. Sh. Abdullina, R. T. Galyautdinovb, 
and N. F. Kashapova

UDC 539.23

The authors investigate SiOx and TiOx 
(0 < x < 2) thin-film coatings with controlled 
absorption which are produced using a jet high-frequency 
plasma under conditions of dynamic vacuum.

aKazan State Technological University, Kazan, Russia; 
bScientific-Research Institute of Pump Manufacturing Engineering, 
Kazan, Russia; email: raf7g@mail.ru.
Translated from Inzhenerno-Fizicheskii 
Zhurnal, Vol. 74, No. 5, pp. 104-107, September-October, 2001. 
Original article submitted September 20, 2000; 
revision submitted January 24, 2001.


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