Journal of Engineering Physics and Thermophysics
is a translation of Inzhenerno-fizicheskii Zhurnal,
a publication of the Academic Scientific Complex
"A. V. Luikov Heat and Mass Transfer Institute"
of the National Academy of Sciences of Belarus
Address of the Editorial Office and
the Publisher
NONLINEAR DISTRIBUTION MODEL OF IONS IMPLANTED
AT HIGH DOSES
A. L. Danilyuk
UDC 621.382
A nonlinear distribution model of ions implanted at high doses
is developed with allowance for sputtering, volume growth
of a target, and retardation by interstitial atoms.
How to get Inzhenerno-Fizicheskii Zhurnal
directly from the Publisher
Scientific-engineering and theoretical
developments (Rus in KOI8-R) in the field of heat and mass transfer
(based on the
advertisements published in Inzhenerno-Fizicheskii Zhurnal)
JEPTER7492019985
JEPTER749205