END-TO-END MATHEMATICAL MODEL OF A RADIO-FREQUENCY INDUCTIVE JET DISCHARGE OF LOWERED PRESSURE

A self-consistent end-to-end model defi ning a radio-frequency inductive jet discharge of lowered pressure (13.3–133 Pa) in an undisturbed gas fl ow and in the presence of a solid body has been proposed. The model comprises three interrelated submodels defi ning the parts of such a discharge, participating in its interaction with the material treated: the plasma jet, the positive-charge layer formed in the neighborhood of the material, and the double electric layer directly near its surface. A peculiarity of the indicated discharge is that, in its plasma jet, a continuous-medium fl ow is changed to a free molecular fl ow, while the fl ow of charged particles in it satisfi es the continuity hypothesis. Because of this, the gasdynamic parameters of the plasma jet are defi ned using the kinetic Boltzmann equation, the fl ow of charged particles in the jet and the positive-charge layer are considered in the hydrodynamic approximation, and the double electric layer formed near the surface of the material is defi ned using the model of a collisionless free molecular fl ow.
A self-consistent end-to-end model defi ning a radio-frequency inductive jet discharge of lowered pressure (13.3–133 Pa) in an undisturbed gas fl ow and in the presence of a solid body has been proposed. The model comprises three interrelated submodels defi ning the parts of such a discharge, participating in its interaction with the material treated: the plasma jet, the positive-charge layer formed in the neighborhood of the material, and the double electric layer directly near its surface. A peculiarity of the indicated discharge is that, in its plasma jet, a continuous-medium fl ow is changed to a free molecular fl ow, while the fl ow of charged particles in it satisfi es the continuity hypothesis. Because of this, the gasdynamic parameters of the plasma jet are defi ned using the kinetic Boltzmann equation, the fl ow of charged particles in the jet and the positive-charge layer are considered in the hydrodynamic approximation, and the double electric layer formed near the surface of the material is defi ned using the model of a collisionless free molecular fl ow.
Author:  I. Sh. Abdullin,a V. S. Zheltukhin, and A. Yu. Shemakhin
Keywords:  radio-frequency inductive discharge, jet fl ow, positive-charge layer, double electric layer, mathematical model, transient regime of fl ow
Page:  480