CHARACTERISTIC FEATURES OF THE FORMATION OF A COMBINED MAGNETRON-LASER PLASMA IN THE PROCESSES OF DEPOSITION OF FILM COATINGS

A block diagram of a facility for combined magnetron-laser deposition of coatings and of the systems of controlling and managing this process is considered. The results of analysis of the infl uence of the gas medium and of laser
radiation parameters on the emission-optical properties of laser plasma are considered. The infl uence of the laser plasma on the electric characteristics of a magnetron discharge is analyzed. The formation of the laser plasmainitiated
pulse arc discharge has been established and the infl uence of the laser radiation parameters on the electric characteristics of this discharge has been determined. The emission optical spectra of the magnetron discharge
plasma and of erosion laser plasma are compared separately and in combination
A block diagram of a facility for combined magnetron-laser deposition of coatings and of the systems of controlling and managing this process is considered. The results of analysis of the infl uence of the gas medium and of laser
radiation parameters on the emission-optical properties of laser plasma are considered. The infl uence of the laser plasma on the electric characteristics of a magnetron discharge is analyzed. The formation of the laser plasmainitiated
pulse arc discharge has been established and the infl uence of the laser radiation parameters on the electric characteristics of this discharge has been determined. The emission optical spectra of the magnetron discharge
plasma and of erosion laser plasma are compared separately and in combination
Author:  A. P. Burmakov, V. N. Kuleshov, and K. Yu. Prokopchik
Keywords:  magnetron discharge plasma, erosion laser plasma, combined magnetron-laser plasma, arc discharge, optical spectroscopy
Page:  1271